Micro X-ray Fluorescence Spectrometer for Light Element Analysis with Low Power Tube Excitation

This system consists of an air cooled low power x-ray tube (50W) with molybdenum anode and a thin (70μm) exit window. An optional beam filter can be inserted to reduce spectral background. The beam is focused onto the sample using a polycapillary x-ray optics, offering a focal spot of about 30μm FWHM. Characteristic X-rays from the sample are detected by means of a Si(Li) detector with ultra thin window. An optical microscope attached to a high resolution CCD camera is used to control the measurement position. Sample positioning and scanning is performed using a motorised xyz sample stage.